Cannot flash attiny1616 with arduino mega jtag2updi

[MeisterQ]

I tired to flash an attiny1616 on a custom pcb.

Im getting this error

avrdude: jtagmkII_initialize(): Cannot locate "flash" and "boot" memories in description
avrdude: jtagmkII_program_enable(): bad response to enter progmode command: RSP_NO_TARGET_POWER
avrdude: jtagmkII_program_enable(): bad response to enter progmode command: RSP_NO_TARGET_POWER
avrdude: jtagmkII_read_byte(): bad response to read memory command: RSP_NO_TARGET_POWER
avr_read(): error reading address 0x0000
    read operation not supported for memory "signature"
avrdude: error reading signature data for part "ATtiny1616", rc=-2
avrdude: error reading signature data, rc=-2
avrdude: jtagmkII_program_disable(): bad response to leave progmode command: RSP_NO_TARGET_POWER
Failed programming: uploading error: exit status 1

Iam using pin 6 as flash pin of my arduino mega. Im powering the attiny1616 with 5V. the arduinos reset pin is shortet with a 470uF capacitor.

Almost a year ago, i flashed another custom PCB with the same arduino and setup and it worked.

Im using megatinycore 2.6.12
Arduino IDE 2.3.6
Im using this attiny https://www.lcsc.com/product-detail/C507118.html?s_z=n_C507118

This are my arduino IDEs settings:

and this is my schematic

Im hopeing for help. Thanks.

[hmeijdam]

Replace 4.7K with 470 Ohm. You are a factor 10 off.
https://wolles-elektronikkiste.de/en/using-megatinycore

[MeisterQ]

@hmeijdam sadly no. My old design was using 4.7k too. I just replaced it with 470ohms, but still does not work.

I cant remember which versions i had before. But it seems like some kind of issue came. Or my settings are bad. No idea.

[pcfreak1201]

Year, same at me with a t1604 - I was able to program once and than again with avrdudess and avrdude 8, but the signature seems to be the problem. Spence doesn't support jtag2updi on a error basis any more. It's obsolete:
(https://github.com/SpenceKonde/AVR-Guidance/blob/master/UPDI/jtag2updi.md)
SerialUPDI does work with no problems :-)